Investigation of doping in III-nitrides by combining atom probe tomography and EDX spectroscopy

C. Bougerol

doi:https://doi.org/10.7567/SSDM.2019.F-2-01

15:45 〜 16:15

[F-2-01 (Invited)] Investigation of doping in III-nitrides by combining atom probe tomography and EDX spectroscopy

^○C. Bougerol¹, L. Amichi², A. Dussaigne³, A. Grenier³, P.H. Jouneau², E. Monroy², E. Robin² (1.CNRS Inst. Neel (France), 2.CEA INAC (France), 3.CEA LETI (France))

https://doi.org/10.7567/SSDM.2019.F-2-01

2019 International Conference on Solid State Devices and Materials

[F-2-01 (Invited)] Investigation of doping in III-nitrides by combining atom probe tomography and EDX spectroscopy