Roll-to-toll Growth of Ga-doped ZnO Transparent Conducting Films by Using Plasma-assisted Molecular Beam Deposition

T. Muranaka

doi:https://doi.org/10.7567/SSDM.2019.G-5-05

10:00 〜 10:15

[G-5-05] Roll-to-toll Growth of Ga-doped ZnO Transparent Conducting Films by Using Plasma-assisted Molecular Beam Deposition

^○T. Muranaka¹, Y. Tsuchiya¹, T. Aoki¹, N. Onojima¹, T. Matsumoto¹, S. Hiraki², H. Kono³, K. Kijima³, S. Hagihara³ (1.Univ. of Yamanashi (Japan), 2.Nakaya Corp. (Japan), 3.Yamanashi Indus. Tech. Center (Japan))

https://doi.org/10.7567/SSDM.2019.G-5-05

2019 International Conference on Solid State Devices and Materials

[G-5-05] Roll-to-toll Growth of Ga-doped ZnO Transparent Conducting Films by Using Plasma-assisted Molecular Beam Deposition