11:00 〜 11:30

[G-6-02 (Invited)] Epitaxial bridging with nanocluster assisted film growth under the mesoplasma condition

^○M. Kambara¹, R. Yamada¹, H. Yamada¹ (1.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2019.G-6-02