Nanofilaments in Ta-O ReRAM Bit Array Fabricated Using 40 nm CMOS Process

M. Arita

doi:https://doi.org/10.7567/SSDM.2019.H-1-01

2:00 PM - 2:30 PM

[H-1-01 (Invited)] Nanofilaments in Ta-O ReRAM Bit Array Fabricated Using 40 nm CMOS Process

^○M. Arita¹, A. T.-Fukuchi¹, Y. Takahashi¹, S. Muraoka², S. Ito², S. Yoneda² (1.Hokkaido Univ. (Japan), 2.Panasonic Semiconductor Solutions Co., Ltd. (Japan))

https://doi.org/10.7567/SSDM.2019.H-1-01

2019 International Conference on Solid State Devices and Materials

[H-1-01 (Invited)] Nanofilaments in Ta-O ReRAM Bit Array Fabricated Using 40 nm CMOS Process