15:00 〜 15:15

[H-1-04] Improvement of HRS Variability in OxRRAM by Tailored Metallic Liner

^○N. Guillaume¹, M. Azzaz¹, S. Blonkowski^1,3, E. Jalaguier¹, P. Gonon², C. Vallée², T. Blomberg⁴, M. Tuominen⁴, H. Sprey⁵, S. Bernasconi¹, C. Charpin-Nicolle¹, E. Nowak¹ (1.CEA LETI (France), 2.LTM (France), 3.STMicroelectronics (France), 4.ASM Microchemistry (Netherlands), 5.ASM Belgium (Belgium))

https://doi.org/10.7567/SSDM.2019.H-1-04