3:00 PM - 3:15 PM
[H-1-04] Improvement of HRS Variability in OxRRAM by Tailored Metallic Liner
○N. Guillaume1, M. Azzaz1, S. Blonkowski1,3, E. Jalaguier1, P. Gonon2, C. Vallée2, T. Blomberg4, M. Tuominen4, H. Sprey5, S. Bernasconi1, C. Charpin-Nicolle1, E. Nowak1
(1.CEA LETI (France), 2.LTM (France), 3.STMicroelectronics (France), 4.ASM Microchemistry (Netherlands), 5.ASM Belgium (Belgium))
https://doi.org/10.7567/SSDM.2019.H-1-04