The Japan Society of Applied Physics

3:00 PM - 3:15 PM

[H-1-04] Improvement of HRS Variability in OxRRAM by Tailored Metallic Liner

N. Guillaume1, M. Azzaz1, S. Blonkowski1,3, E. Jalaguier1, P. Gonon2, C. Vallée2, T. Blomberg4, M. Tuominen4, H. Sprey5, S. Bernasconi1, C. Charpin-Nicolle1, E. Nowak1 (1.CEA LETI (France), 2.LTM (France), 3.STMicroelectronics (France), 4.ASM Microchemistry (Netherlands), 5.ASM Belgium (Belgium))

https://doi.org/10.7567/SSDM.2019.H-1-04