The Japan Society of Applied Physics

4:45 PM - 5:00 PM

[H-2-05] Memory Window and Endurance Improvement of HfZrO Based FeFETs with ZrO2 Seed Layers

W. Xiao1, C. Liu1, Y. Peng2, S. Zheng1, C. Zhang2, J. Zhang2, Y. Hao2, M. Liao1, Y. Zhou1 (1.Xiangtan Univ. (China), 2.Xidian Univ. (China))

https://doi.org/10.7567/SSDM.2019.H-2-05