The Japan Society of Applied Physics

17:00 〜 17:15

[H-2-06] Polarization Dependency of Time-Dependent Dielectric Breakdown (TDDB)Characteristics in Ferroelectric HfZrOx

T.-H. Yang1, C.-J. Su2, Y.-S. Wang3, K.-H. Kao3, Y.-J. Lee2, T.-L. Wu1 (1.National Chiao Tung Univ. (Taiwan), 2.Taiwan Semiconductor Res. Inst. (Taiwan), 3.National Cheng Kung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2019.H-2-06