3:15 PM - 3:30 PM

[J-1-04] Barometric Pressure Sensor with Air Pockets fabricated by CMOS Process Technology

^○D. Jang¹, Y. Hong¹, S. Hong¹, Y. Jeong¹, G. Jung¹, J.-H. Lee¹ (1.Seoul National Univ. (Korea))

https://doi.org/10.7567/SSDM.2019.J-1-04