The Japan Society of Applied Physics

10:00 AM - 10:15 AM

[J-5-04] Development of Electret made of SiO2 Thin Film with Micro Bump Array to Avoid Electrostatic Stiction and Enhance Its Surface Potential

M. Suzuki1, Y. Onishi1, T. Takahashi1, S. Aoyagi1 (1.Kansai Univ. (Japan))

https://doi.org/10.7567/SSDM.2019.J-5-04