10:00 AM - 10:15 AM
[J-5-04] Development of Electret made of SiO2 Thin Film with Micro Bump Array to Avoid Electrostatic Stiction and Enhance Its Surface Potential
○M. Suzuki1, Y. Onishi1, T. Takahashi1, S. Aoyagi1
(1.Kansai Univ. (Japan))
https://doi.org/10.7567/SSDM.2019.J-5-04