The Japan Society of Applied Physics

14:00 〜 14:15

[K-7-04] Quick measurement method of carbon-related defect concentration in n-type GaN by dual-color-sub-bandgap-light-excited isothermal capacitance transient spectroscopy

K. Kanegae1, T. Narita2, K. Tomita2, T. Kachi3, M. Horita3,1, T. Kimoto1, J. Suda1,3 (1.Kyoto Univ. (Japan), 2.Toyota Central R&D Labs. (Japan), 3.Nagoya Univ. (Japan))

https://doi.org/10.7567/SSDM.2019.K-7-04