09:00 〜 09:30

[M-3-01 (Invited)] Integrated Hybrid MEMS Hydrogen Sensor with high sensitivity and wide dynamic range

^○H. Yamazaki¹, Y. Hayashi¹, K. Masunishi¹, T. Saito¹, D. Ono¹, N. Nakamura¹, A. Kojima¹ (1.Toshiba Corp. (Japan))

https://doi.org/10.7567/SSDM.2019.M-3-01