The Japan Society of Applied Physics

10:00 〜 10:15

[M-3-04 (Late News)] An Energy Efficient Normally-Off CPU with 2.4 pW Negative Voltage Generator Featuring 60-nm Crystalline Indium-Gallium-Zinc Oxide FETs in BEOL

F. Akasawa1, K. Furutani1, T. Ishizu1,K. Sasaki1, Y. Yakubo1, A. Isobe1, T. Ando1, T. Murakawa1, T. Ikeda1, K. Kato1, S. Yamazaki1 (1.Semiconductor Energy Laboratory Co., Ltd. (Japan))

https://doi.org/10.7567/SSDM.2019.M-3-04