The Japan Society of Applied Physics

16:00 〜 16:15

[N-2-02] Impact of Germanium Concentration on the Ultraviolet Nanosecond Laser Annealing of Intrinsic Si1-xGex Epitaxial Layers

L. Dagault1,2, S. Kerdilès1, P. Acosta-Alba1, J.-M. Hartmann1, J.-P. Barnes1, P. Gergaud1, F. Cristiano2 (1.CEA-LETI, Univ. Grenoble Alpes (France), 2.LAAS-CNRS, Univ. Toulouse (France))

https://doi.org/10.7567/SSDM.2019.N-2-02