09:00 〜 09:30

[N-5-01 (Invited)] FinFET Extension towards N3 and Beyond – Local Fin Trimming

^○T. Miyashita¹, S. Mittal¹, K. Suen¹, M.S. Kim¹, A. Pal¹, A. Sachid¹, M. Cogorno¹ (1.Applied Materials, Inc. (USA))

https://doi.org/10.7567/SSDM.2019.N-5-01