11:30 AM - 11:45 AM

[N-6-05] Effects of Variability in Plasma-Induced Damage to Si Substrate on Device Performance and Its Application to Variability Assessment Methodology

^○T. Hamano¹, K. Urabe¹, K. Eriguchi¹ (1.Kyoto Univ. (Japan))

https://doi.org/10.7567/SSDM.2019.N-6-05