The Japan Society of Applied Physics

13:00 〜 15:00

[PS-1-02] X-ray Photoelectron Spectroscopy Study of the Physical Chemistry of the TiN/Hf0.5Zr0.5O2 Interface

N. Barrett1,2,3, W. Hamouda1,2,3, A. Pancotti1,2,3, C. Lubin1,2,3, L. Tortech1,2,3, C. Richter4, U. Schroeder4 (1.CEA Saclay (France), 2.CNRS (France), 3.Univ. Paris Saclay (France), 4.NaMLab (Germany))

https://doi.org/10.7567/SSDM.2019.PS-1-02