13:00 〜 15:00

[PS-1-02] X-ray Photoelectron Spectroscopy Study of the Physical Chemistry of the TiN/Hf_0.5Zr_0.5O₂ Interface

^○N. Barrett^1,2,3, W. Hamouda^1,2,3, A. Pancotti^1,2,3, C. Lubin^1,2,3, L. Tortech^1,2,3, C. Richter⁴, U. Schroeder⁴ (1.CEA Saclay (France), 2.CNRS (France), 3.Univ. Paris Saclay (France), 4.NaMLab (Germany))

https://doi.org/10.7567/SSDM.2019.PS-1-02