13:00 〜 15:00

[PS-1-11] Enhanced Electrical Characteristics of FinFETs with Strained SiGe Super-Lattice Channel

^○B.-X. Lu¹, K.-S. Chang-Liao¹, Y.-L. Li¹, D.-B. Ruan¹, S.-H. Hsu¹, Y.-Z. Chien¹, K.-Y. Lai¹ (1.National Tsing Hua Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2019.PS-1-11