The Japan Society of Applied Physics

13:00 〜 15:00

[PS-1-22 (Late News)] Comparison of Voronoi and Cuboid Methods for Work Function Fluctuation and Suppression by Using Stacked-metal Gate on Gate-All-Around Nanowire n-MOSFETs

Y.-S. Yang1, W.-L. Sung1, M.-H. Chuang1, Y. Li1 (1.National Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2019.PS-1-22