Comparison of Voronoi and Cuboid Methods for Work Function Fluctuation and Suppression by Using Stacked-metal Gate on Gate-All-Around Nanowire n-MOSFETs

13:00 〜 15:00

[PS-1-22 (Late News)] Comparison of Voronoi and Cuboid Methods for Work Function Fluctuation and Suppression by Using Stacked-metal Gate on Gate-All-Around Nanowire n-MOSFETs

^○Y.-S. Yang¹, W.-L. Sung¹, M.-H. Chuang¹, Y. Li¹ (1.National Chiao Tung Univ. (Taiwan))