The Japan Society of Applied Physics

1:00 PM - 3:00 PM

[PS-1-23 (Late News)] Improved Electro-Thermal Performance in FinFETs using SOD Technology for 7nm node High Performance Logic Devices

V. Sankatali1, A. Sudarsanan1, K. Nayak1 (1.Indian Inst. of Tech. Hyderabad (India))

https://doi.org/10.7567/SSDM.2019.PS-1-23