The Japan Society of Applied Physics

13:00 〜 15:00

[PS-10-05] Growth mechanism of Zinc Oxide thin film by mist-CVD via the modulation of [H2O]/[Zn] ratios

P. Rutthongjan1, M. Nishi1, L. Liu1,2, S. Sato1, G.T. Dang1,2, T. Kawaharamura1,2 (1.Graduated school of Engineering Kochi Univ. of Tech. (Japan), 2.Center for Nanotechnology, Research Inst. Univ. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2019.PS-10-05