The Japan Society of Applied Physics

13:00 〜 15:00

[PS-10-06] Structure Analysis for Clarification of Spatial Distribution of Crystals and Boundary Region between Crystals in CAAC-IGZO

H. Baba1, S. Mizukami1, N. Sorida1, H. Nakayama1, O. Ueda2, S. Yamazaki1 (1.Semiconductor Energy Lab. Co., Ltd. (Japan), 2.Meiji Univ. (Japan))

https://doi.org/10.7567/SSDM.2019.PS-10-06