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[PS-10-06] Structure Analysis for Clarification of Spatial Distribution of Crystals and Boundary Region between Crystals in CAAC-IGZO

^○H. Baba¹, S. Mizukami¹, N. Sorida¹, H. Nakayama¹, O. Ueda², S. Yamazaki¹ (1.Semiconductor Energy Lab. Co., Ltd. (Japan), 2.Meiji Univ. (Japan))

https://doi.org/10.7567/SSDM.2019.PS-10-06