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[PS-11-04] Sub 10nm Localized Thinning of Atomic Layers Tungsten Disulfide via In-situ STEM/TEM

^○Y.T. Tseng¹, K.L. Tai¹, W.W. Wu¹ (1.National Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2019.PS-11-04