The Japan Society of Applied Physics

13:00 〜 15:00

[PS-11-10] Laser Slicing Lift-Off Process for GaN-on-GaN Technology

V. Voronenkov1,2, N. Bochkareva1, R. Gorbunov1,2, A. Zubrilov1,2, V. Kogotkov2, P. Latyshev2, Y. Lelikov1,2, A. Leonidov2, Y. Shreter1,2 (1.Ioffe Institute (Russia), 2.TRINITRI-Technology (Russia))

https://doi.org/10.7567/SSDM.2019.PS-11-10