The Japan Society of Applied Physics

1:00 PM - 3:00 PM

[PS-4-03] Evaluation of Carrier Recombination Lifetime in Silicon Epitaxial Layer by Open Circuit Voltage Decay Method

S. Sasaki1, N. Mitsugi1, S. Samata1, W. Manabe2, M. Tsukuda2, H. Y.-Kaneta2, I. Omura2 (1.SUMCO Corp. (Japan), 2.Kyushu Institute of Technology (Japan))

https://doi.org/10.7567/SSDM.2019.PS-4-03