Study on the Effects of Si Implantation on the Interface of 4H-SiC MOSFET

1:00 PM - 3:00 PM

[PS-4-09] Study on the Effects of Si Implantation on the Interface of 4H-SiC MOSFET

^○J.-Y. Jiang¹, J.-Q. Hung¹, P.-W. Huang¹, T.-L. Wu², C.-F. Huang¹ (1.National Tsing Hua Univ. (Taiwan), 2.National Chiao Tung Univ. (Taiwan))