The Japan Society of Applied Physics

13:00 〜 15:00

[PS-4-10] Synchrotron X-ray Photoelectron Spectroscopy on interface state densities of CVD-Grown SiO2/4H-SiC Sturcures Treated by Post-Deposition Treatments

A. Kiyoi1, T. Suwa2, K. Kawase1, A. Teramoto2 (1.Mitsubishi Electric Corp. (Japan), 2.Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2019.PS-4-10