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[PS-4-12] Diamond Schottky barrier diodes on half-inch single-crystal wafers fabricated by Minimal Fab System

^○T. Hanada¹, H. Umezawa², S. Ohmagari², D. Takeuchi², J. Higedon Kaneko¹ (1.Hokkaido Univ. (Japan), 2.AIST (Japan))

https://doi.org/10.7567/SSDM.2019.PS-4-12