The Japan Society of Applied Physics

13:00 〜 15:00

[PS-4-14] Theoretical approach to oxygen incorporation mechanism in vicinal m-GaN MOVPE

F. Shintaku1, Y. Kangawa1,2,3, J. Iwata4, A. Oshiyama3, K. Shiraishi3, A. Tanaka3, H. Amano3 (1.Dept. Aeronautics and Astronautics, Kyushu Univ. (Japan), 2.RIAM, Kyushu Univ. (Japan), 3.IMaSS, Nagoya Univ. (Japan), 4.AdvanceSoft Corp. (Japan))

https://doi.org/10.7567/SSDM.2019.PS-4-14