13:00 〜 15:00

[PS-4-17] Impacts of nitrogen plasma surface cleaning on threshold voltages of AlTiO/AlGaN/GaN MIS devices

^○D.D. Nguyen¹, Y. Deng¹, T. Suzuki¹ (1.JAIST (Japan))

https://doi.org/10.7567/SSDM.2019.PS-4-17