Effect of Joule Heating on Titanium Microbolometer with Integrated Heater and Thermistor

D. Elamaran

doi:https://doi.org/10.7567/SSDM.2019.PS-5-06

13:00 〜 15:00

[PS-5-06] Effect of Joule Heating on Titanium Microbolometer with Integrated Heater and Thermistor

^○D. Elamaran¹, K. Akiba², H. Satoh³, N. Hiromoto², H. Inokawa³ (1.GSST, Shizuoka Univ. (Japan), 2.GSIST, Shizuoka Univ. (Japan), 3.RIE, Shizuoka Univ. (Japan))

https://doi.org/10.7567/SSDM.2019.PS-5-06

2019 International Conference on Solid State Devices and Materials

[PS-5-06] Effect of Joule Heating on Titanium Microbolometer with Integrated Heater and Thermistor