13:00 〜 15:00

[PS-7-11] The Selectivity of Nitric Oxide and Ammonia Gas Sensor based on Surface Modified Poly-Si Nanowires FETs

^○H.-Y. Lin¹, Y.-P. Liu¹, H.-M.P. Chen¹ (1.National Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2019.PS-7-11