Improved sensitivity of pH sensors based on hydrothermally grown nickel oxide nanosheets on Si surface with pyramidal cones

C.Y. Kuo

doi:https://doi.org/10.7567/SSDM.2019.PS-7-17

13:00 〜 15:00

[PS-7-17] Improved sensitivity of pH sensors based on hydrothermally grown nickel oxide nanosheets on Si surface with pyramidal cones

^○C.Y. Kuo¹, S.Y. Wang¹, S.J. Wang^1,2, R.M. Ko², Y.S. Chang¹, P.T. Chen¹ (1.Institute of Microelectronics, Dept. of Electrical Eng., National Cheng Kung Univ. (Taiwan), 2.College of Electrical Engineering and Computer Science, National Cheng Kung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2019.PS-7-17

2019 International Conference on Solid State Devices and Materials

[PS-7-17] Improved sensitivity of pH sensors based on hydrothermally grown nickel oxide nanosheets on Si surface with pyramidal cones