The Japan Society of Applied Physics

1:00 PM - 3:00 PM

[PS-8-18] Development of Fabrication process for tin sulfide (SnSX) thin films by solution-based atmospheric-pressure mist CVD

S. Sato1, P. Rutthongjan1, L. Liu1,2,3, G.T. Dang1,2,3, T. Kawaharamura1,2,3 (1.Eng. Course, Graduate School of Engineering, Kochi Univ. of Technol. (Japan), 2.School of Systems Engineering, Kochi Univ. of Technol. (Japan), 3.Center for Nanotechnology, Res. Inst., Kochi Univ. of Technol. (Japan))

https://doi.org/10.7567/SSDM.2019.PS-8-18