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[PS-8-19] Chemical Vapor Deposition of NbS₂ from a Chloride Source

T. Yanase¹, S. Watanabe¹, M. Weng¹, T. Nagahama¹,^○T. Shimada¹ (1.Hokkaido Univ. (Japan))

https://doi.org/10.7567/SSDM.2019.PS-8-19