X-ray Photoelectron Spectroscopy Study of the Physical Chemistry of the TiN/Hf0.5Zr0.5O2 Interface

N. Barrett

10:47 〜 10:49

[PS-1-02] X-ray Photoelectron Spectroscopy Study of the Physical Chemistry of the TiN/Hf_0.5Zr_0.5O₂ Interface

^○N. Barrett^1,2,3, W. Hamouda^1,2,3, A. Pancotti^1,2,3, C. Lubin^1,2,3, L. Tortech^1,2,3, C. Richter⁴, U. Schroeder⁴ (1.CEA Saclay (France), 2.CNRS (France), 3.Univ. Paris Saclay (France), 4.NaMLab (Germany))

2019 International Conference on Solid State Devices and Materials

[PS-1-02] X-ray Photoelectron Spectroscopy Study of the Physical Chemistry of the TiN/Hf0.5Zr0.5O2 Interface

[PS-1-02] X-ray Photoelectron Spectroscopy Study of the Physical Chemistry of the TiN/Hf_0.5Zr_0.5O₂ Interface