11:05 〜 11:07 [PS-1-11] Enhanced Electrical Characteristics of FinFETs with Strained SiGe Super-Lattice Channel ○B.-X. Lu1, K.-S. Chang-Liao1, Y.-L. Li1, D.-B. Ruan1, S.-H. Hsu1, Y.-Z. Chien1, K.-Y. Lai1 (1.National Tsing Hua Univ. (Taiwan))