2019 International Conference on Solid State Devices and Materials

2019年9月2日〜 2019年9月5日
Nagoya University

11:21 〜 11:23

[PS-1-19 (Late News)] Extremely low temperature selective epitaxial processes for advanced CMOS applications

A. Hikavyy¹,^○C. Porret¹, E. Rosseel¹, P. Favia¹, R. Loo¹ (1.imec (Belgium))

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