10:55 〜 10:57

[PS-10-06] Structure Analysis for Clarification of Spatial Distribution of Crystals and Boundary Region between Crystals in CAAC-IGZO

^○H. Baba¹, S. Mizukami¹, N. Sorida¹, H. Nakayama¹, O. Ueda², S. Yamazaki¹ (1.Semiconductor Energy Lab. Co., Ltd. (Japan), 2.Meiji Univ. (Japan))