The Japan Society of Applied Physics

10:59 〜 11:01

[PS-10-08] Characterization of Al1-xTixOy thin films deposited by mist-CVD

Z. Yatabe1, K. Nishiyama1, K. Nishimura1, Y. Nakamura1,2 (1.Kumamoto Univ. (Japan), 2.Kumamoto Phoenics (Japan))