2019 International Conference on Solid State Devices and Materials
Sep 2, 2019 - Sep 5, 2019 Nagoya University
11:05 AM - 11:07 AM
[PS-10-11] Atmospheric-Pressure Plasma-Enhanced Chemical Vapor Deposition of Silicon and Silicon Oxide Layers for Low-Temperature Thin Film Transistors
○H. Kakiuchi1, H. Ohmi1, K. Yasutake1 (1.Osaka Univ. (Japan))
