10:59 AM - 11:01 AM

[PS-4-08] A LOCal Oxidation of SiC (LOCOSiC) Process for 4H-SiC Integrated Circuits

B.-Y. Tsui¹, Y.-R. Jhuang¹,^○J.-C. Cheng¹ (1.National Chiao Tung Univ. (Taiwan))