11:11 〜 11:13

[PS-4-14] Theoretical approach to oxygen incorporation mechanism in vicinal m-GaN MOVPE

^○F. Shintaku¹, Y. Kangawa^1,2,3, J. Iwata⁴, A. Oshiyama³, K. Shiraishi³, A. Tanaka³, H. Amano³ (1.Dept. Aeronautics and Astronautics, Kyushu Univ. (Japan), 2.RIAM, Kyushu Univ. (Japan), 3.IMaSS, Nagoya Univ. (Japan), 4.AdvanceSoft Corp. (Japan))