Effect of Joule Heating on Titanium Microbolometer with Integrated Heater and Thermistor

D. Elamaran

2019 International Conference on Solid State Devices and Materials

2019年9月2日〜 2019年9月5日
Nagoya University

10:55 〜 10:57

[PS-5-06] Effect of Joule Heating on Titanium Microbolometer with Integrated Heater and Thermistor

^○D. Elamaran¹, K. Akiba², H. Satoh³, N. Hiromoto², H. Inokawa³ (1.GSST, Shizuoka Univ. (Japan), 2.GSIST, Shizuoka Univ. (Japan), 3.RIE, Shizuoka Univ. (Japan))

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