Improved sensitivity of pH sensors based on hydrothermally grown nickel oxide nanosheets on Si surface with pyramidal cones

C.Y. Kuo

11:17 〜 11:19

[PS-7-17] Improved sensitivity of pH sensors based on hydrothermally grown nickel oxide nanosheets on Si surface with pyramidal cones

^○C.Y. Kuo¹, S.Y. Wang¹, S.J. Wang^1,2, R.M. Ko², Y.S. Chang¹, P.T. Chen¹ (1.Institute of Microelectronics, Dept. of Electrical Eng., National Cheng Kung Univ. (Taiwan), 2.College of Electrical Engineering and Computer Science, National Cheng Kung Univ. (Taiwan))

2019 International Conference on Solid State Devices and Materials

[PS-7-17] Improved sensitivity of pH sensors based on hydrothermally grown nickel oxide nanosheets on Si surface with pyramidal cones