The Japan Society of Applied Physics

10:45 AM - 10:47 AM

[PS-8-01] SiC Quantum Dots in Si-Oxide Layer Fabricated by Double Hot-Si+/C+-Ion Implantation Technique

T. Mizuno1,R. Kanazawa1, T. Aoki1, T. Sameshima2 (1.Kanagawa Univ. (Japan), 2.Tokyo Univ. of Agri. and Tech. (Japan))