14:45 〜 15:00

[A-1-04] Understanding wet annealing effect on phase transition and ferroelectric phase formation for Hf_1-xZr_xO₂ film

〇Shigehisa Shibayama¹, Jotaro Nagano¹, Mitsuo Sakashita¹, Osamu Nakatsuka^1,2 (1. Nagoya Univ.(Japan), 2. IMaSS, Nagoya Univ.(Japan))

https://doi.org/10.7567/SSDM.2020.A-1-04